| 摘要 |
A hydrostatic slider for moving a moving element relatively with a solid element with a hydrostatic fluid layer formed of a pressurized fluid interposed between the solid element and the moving element. The hydrostatic slider comprises a solid element (2) having a dynamic guide surface, and a moving element (3) capable of moving relatively along the dynamic guide surface, a measuring means for directly measuring the distance between the dynamic guide surface and a facing surface at the end of the moving element facing the dynamic guide surface being provided. Preferably, the measuring means includes first conductor layers (25-28) formed on the dynamic guide surface and second conductor layer (31A-34A) formed on the facing surface, the first and the second conductor layers being constituted so as to measure electrostatic capacity between the these conductor layers. The moving element has a moving body (30) and displacing bodies (31-34) displaceable relative to the moving body in a direction perpendicular to the moving direction of the moving element with their end surfaces constituting the above facing surface, and further has a control means for controlling the positions of the displacing bodies so as to adjust the distance between the dynamic guide surface and the facing surface based on measurement results by the measuring means. |
