发明名称 SCRUB WASHING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a scrub washing apparatus which is capable of efficiently and surely eliminating the fouling of the surface of a ring-like work piece having central apertures and the fouling difficult to strip especially attached on the edge of the aperture by using a roll brush provided with spiral projections at the outer peripheral surface. SOLUTION: A pair of roll brushes 4a, 4b having projections 22 on the outer peripheral surface are brought into contact with the proximal position to the lower end portion of the central aperture 1a of both surfaces of the work piece 1 rotating in the washing liquid 3. The projection 22 is formed by a straight line part 22a straightforwardly extending to the axis line direction of the brush and spiral parts 22b, 22c which are each spirally extended from both ends of the straight line part 22a and in which the spirally wound direction are opposite direction with each other. The fouling attached to the edge of the aperture is eliminated by tangentially sliding and contacting the straight line part 22a with the edge of the aperture of the central aperture 1a of the work piece 1 and the fouling of the annular surface 1b is eliminated by sliding and contacting the spiral parts 22b, 22c with the annular surface 1b of the work piece 1. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008142590(A) 申请公布日期 2008.06.26
申请号 JP20060329842 申请日期 2006.12.06
申请人 SPEEDFAM CLEAN SYSTEM CO LTD 发明人 NAGAKI HIROAKI;INOUE YUJI;NAGAOKA KAZUTOSHI
分类号 B08B1/04;G11B5/84 主分类号 B08B1/04
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