| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a rotary tool for soft material processing and a manufacturing method thereof, restraining abnormal growth of diamond particles to form a smooth surface of a diamond coat, thereby long stabilizing the life, and preventing the occurrence of scratch on a semiconductor wafer or the like to be polished by a pad. <P>SOLUTION: While a workpiece made of soft material is moved, this rotary tool for soft material processing conducts processing for the workpiece. A cutting blade projecting part 11 is formed to project on the surface of a base plate opposite to the workpiece, the projecting end face 11A of the cutting blade projecting part 11 is formed with a recessed part 12, which has a bottom face shaped like a recessed curve in cross section, and which is formed to be recessed to the projecting end face 11A, by laser processing, and the bottom face 12A of the recessed part 12 is coated with a diamond film. <P>COPYRIGHT: (C)2008,JPO&INPIT |
