| 摘要 |
PROBLEM TO BE SOLVED: To provide a nozzlecapable of making both of a sweeping efficiency and a recovering property compatibly with each other, and to provide a liquid recovery method. SOLUTION: When sweeping a sample surface with liquid extruded from the top end of the nozzle and sucking the liquid after sweeping with the nozzle for recovery, a nozzle having an end face 310 with an outer edge 312 protruded in the top end direction and an opening 322 eccentric near to the outer edge at the end face, is used for the nozzle 100. The liquid after sweeping is sucked by relatively moving the nozzle along the sample surface in the direction reverse to eccentric direction of the opening. COPYRIGHT: (C)2008,JPO&INPIT
|
