ANTI-STATIC PART AND ITS MANUFACTURING METHOD

摘要

A conductive layer containing gold as a main component is formed on the upper surface of an insulating base. A gap is formed on the conductive layer. A plurality of leader electrodes are formed to oppose one another via the gap. An excess voltage protection material layer is formed to cover some parts of the respective leader electrodes and the gap, so as to obtain an anti-static part. This method enables an accurate formation of a narrow gasp. Thus, it is possible to manufacture an anti-static part having a low peak voltage, stable suppression characteristic of electrostatic discharge (ESD), and a high sulfide resistance.