发明名称 |
RETICLE MANAGEMENT SYSTEMS AND METHODS |
摘要 |
Reticle management systems and methods. The system comprises at least one reticle and at least one cabinet with an inert gas environment. The cabinet comprises a plurality of storage spaces. When the reticle is put in a storage space, the cabinet identifies the reticle and the storage space occupied thereby. The cabinet provides inert gas to the reticle. The storage information of the reticle in the cabinet and/or an inert gas status of the reticle are provided to a query system and a dispatch system for reticle location query and lot dispatching.
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申请公布号 |
US2008100814(A1) |
申请公布日期 |
2008.05.01 |
申请号 |
US20060554060 |
申请日期 |
2006.10.30 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
CHEN YUNG-HO;YEN PING-YUNG |
分类号 |
G03B27/52 |
主分类号 |
G03B27/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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