| 摘要 |
PROBLEM TO BE SOLVED: To make an ion beam processing program in an efficient manner. SOLUTION: A Faraday cup 8 measuring the current status of an ion beam 3 is disposed on a drive stage 6 carrying a workpiece of an optical element material 7. A removal rate and a removal shape per unit time in processing the optical element material 7 by the ion beam 3 are calculated from output from the Faraday cup 8, and a processing program is made for obtaining a desired processed shape. Following this processing program, a radiation quantity of the ion beam 3, etc., are controlled in processing the optical element material 7. COPYRIGHT: (C)2008,JPO&INPIT
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