OPTICAL OXYGEN SENSOR CHIP, MANUFACTURING METHOD OF SAME, AND OPTICAL OXYGEN SENSOR USING SAME

摘要

PROBLEM TO BE SOLVED: To provide an optical oxygen sensor chip for detecting oxygen with high sensivity, in an aqueous solution, and to provide its manufacturing method and an optical oxygen sensor that uses it. SOLUTION: The optical oxygen sensor chip includes a hydrolytic cleavage/polymerized membrane of a silane-alkoxide containing a porphyrin compound on a substrate. The manufacturing method sequentially has a process for implementing a hydrolytic cleavage/polymerization of a silane-alkoxide solution containing the porphyrin compound, a process for condensing the silane-alkoxide solution applied with the hydrolytic cleavage/polymerization, and a process for coating the condensed silane-alkoxide solution on the substrate. COPYRIGHT: (C)2008,JPO&INPIT