| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a matter that the electric energy being fed to plasma increases because a high voltage must be applied between the electrodes in order to generate and sustain uniform plasma between the electrodes at a second plasma processing step when a first plasma processing step and the second plasma processing step of higher discharge start voltage are performed in the same plasma reaction chamber. <P>SOLUTION: When pulse modulated AC power is employed in the second plasma processing step of high discharge start voltage, uniform plasma is generated and sustained between the electrodes and the electric energy being fed between the electrodes can be reduced. Consequently, plasma processing speed is lowered and control of processing amount is facilitated. <P>COPYRIGHT: (C)2008,JPO&INPIT |
