PROBE DEVICE WITH OPTICAL LENGTH-MEASURING DEVICE AND METHOD OF INSPECTING PROBE,申请号KR20057013305-传众专利搜索

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发明名称	PROBE DEVICE WITH OPTICAL LENGTH-MEASURING DEVICE AND METHOD OF INSPECTING PROBE
摘要
申请公布号	KR100787401(B1)	申请公布日期	2007.12.21
申请号	KR20057013305	申请日期	2005.07.19
申请人		发明人
分类号	G01R1/06;H01L21/66;G01R31/28	主分类号	G01R1/06
代理机构		代理人
主权项
地址

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