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发明名称
摘要
申请公布号
JP4023955(B2)
申请公布日期
2007.12.19
申请号
JP19990194975
申请日期
1999.07.08
申请人
发明人
分类号
H01L21/28;H01L21/288;H01L21/3205;H01L21/768;H01L23/522
主分类号
H01L21/28
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