| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic cleaner that can obtain sufficient cleaning efficiency with less damage given to an object to be cleaned, and to provide an ultrasonic cleaning method. SOLUTION: The ultrasonic cleaner for ultrasonically cleaning the object to be cleaned includes at least: an ultrasonic vibrator that generates an ultrasonic vibration; a means where the ultrasonic vibrator is mounted, for bringing a cleaning solution to which ultrasonic vibration is applied into contact with the object; and a gas introduction means for introducing gas more than the amount of saturated and dissolved gas into the cleaning solution to make bubbles exist in the cleaning solution. The ultrasonic cleaner vibrates the bubbles introduced in the cleaning solution and cleans the object by applying the ultrasonic vibration to the cleaning liquid with the ultrasonic vibrator. COPYRIGHT: (C)2008,JPO&INPIT
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