| 摘要 |
A measurement coordinate setting system is disclosed, which includes a measuring apparatus which measures a dimension in each of a plurality of portions of a first product, a sampling approximation module which approximates a distribution of the dimensions of the plurality of portions using a sampling orthogonal polynomial as a function of a coordinate, and a selection coordinate setting module which sets a plurality of selection coordinates at which dimensions of a second product are to be measured to inspect the approximated distribution of the dimensions regarding the second product.
|
