| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a wavelength conversion element that can perform proper mode design. SOLUTION: The method for manufacturing the wavelength conversion element has a process for cyclically forming a plurality of recesses 3, at intervals in a direction of a light wave guide, by partly etching a first semiconductor layer 1 orientating a crystal axis in a first direction to a substrate face; a process for growing a second semiconductor layer 4 orientating the crystal axis, in a second direction different from the first direction in at least the recesses 3; and a process for simultaneously optically polishing the surface of the first semiconductor layer 1 and the surface of the semiconductor layer 4. COPYRIGHT: (C)2008,JPO&INPIT
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