| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe holder for performing probe change simply and in a short time without troubling a worker and being applicable also to a small-sized scanning probe microscope. SOLUTION: This probe holder 3 is disposed opposite to a specimen S and used for thereon fixing a plurality of probes 2 each having a probe 2b on an end of a lever part 2a with the base end side of the lever part supported in a cantilevered state on a body part 2c. This probe holder 3 is equipped with a fixation plate 10 comprising an opposite surface 10a standing opposite to a specimen surface S1 for fixing the plurality of probes severally removably on the opposite surface via the body part, a holder body 11 for movably supporting the fixation plate, and a movable means 12 for moving the fixation plate while positioning any selected probe among the plurality of probes at an observation position P. COPYRIGHT: (C)2008,JPO&INPIT
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