| 摘要 |
PROBLEM TO BE SOLVED: To provide a spray fluxer apparatus having high production yield and productivity. SOLUTION: The spray fluxer for spraying a liquid flux to apply the liquid flux on a semiconductor substrate is provided with a loader/unloader part 51 for mounting a container in which the semiconductor substrate is housed, a transfer apparatus 54 for taking out the semiconductor substrate from the container and mounting onto a substrate holding tool, a flux coating part 53 constituted of one or a plurality of spray nozzle units for applying the liquid flux on the semiconductor substrate and the substrate holding tool and a heating part 54 for heating the semiconductor substrate. COPYRIGHT: (C)2008,JPO&INPIT
|
