| 摘要 |
PROBLEM TO BE SOLVED: To provide a nozzle plate manufacturing method wherein a taper portion of a nozzle can be made into a cross section shape and an angle as desired, and the taper section and the linear portion of the nozzle can be aligned. SOLUTION: The nozzle plate manufacturing method comprises the etch stopper forming step of forming an etch stopper layer to block the progress of etching for a silicon substrate on one surface of the substrate, the mask layer forming step of forming a mask layer on the other surface of the silicone substrate, the mask patterning step of mask-patterning an opening of the mask layer, the taper portion forming step of forming a taper portion of a nozzle in the silicone substrate by dry etching the substrate from the mask layer side, the linear portion forming step of forming a linear portion of the nozzle in the etch stopper layer by dry etching the substrate from the mask layer side; and the mask layer peeling step of peeling off the mask layer. COPYRIGHT: (C)2008,JPO&INPIT
|
