| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer and a method of measuring the shapes of various samples simply. SOLUTION: The interferometer concerning one mode comprises the laser light source 11, the X scanner 16, the half-wave plate 20 installed rotatably, the Y scanner 23; the PBS (polarization beam splitter) 26 for splitting into two light beams, the objective lens 27 for sample for converging one light beam, the objective lens 30 for reference for converging the other light beam, the reference mirror 31 for reflecting the light beam converged by the reference objective lens 30, the first non polarization beam splitter 22 for splitting the composite light of measurement light and reference light from illumination light, the quarter wave plate 42 installed in the light path of the composite light, and the first line sensor 52 for receiving the composite light from the quarter waveplate 42 through the first polarization plate 51. COPYRIGHT: (C)2007,JPO&INPIT
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