ON-THE-FLY BEAM PATH ERROR CORRECTION FOR MEMORY LINK PROCESSING

摘要

PROBLEM TO BE SOLVED: To provide a method where the throughput and accuracy of semiconductor link processing applications are increased.

SOLUTION: A laser beam positioner 340 employs a steering mirror that performs small-angle deflection of a laser beam to compensate for cross-axis settling errors of a positioner stage. A two-axis mirror is preferred because either axis of the positioner stages may be used for performing work. In one embodiment, the steering mirror is used for error correction only without necessarily requiring coordination with the positioning stage position commands. A fast steering mirror employing a flexure mechanism and piezoelectric actuators to tip and tilt the mirror is preferred in semiconductor link processing applications.

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