| 摘要 |
PROBLEM TO BE SOLVED: To provide a member for an electrostatic chuck and a method for adjusting the surface resistance of the member adjusting the surface resistance by a simple method that does not cause contamination to a member for the electrostatic chuck. SOLUTION: The member for the electrostatic chuck has a base, an electrode layer formed on the top face of the base, and an upper insulating layer formed on the base so as to coat the electrode layer. In the member of the electrostatic chuck, the base, and the upper insulating layer are composed of ceramic materials of the same kind mainly comprising one kind of a material selected from AlN, Al<SB>2</SB>O<SB>3</SB>and Si<SB>3</SB>N<SB>4</SB>. In the member, the surface resistance at a normal temperature of a contact surface with a substance attracted in the upper insulating layer is adjusted previously before shipment so as to reach 1.0×10<SP>14</SP>to 1.5×10<SP>16</SP>Ω/sq. COPYRIGHT: (C)2007,JPO&INPIT |
