PATTERNING METHOD OF THIN FILM

摘要

A method for patterning a thin film is provided to enhance the reproducibility and reliability, to improve the yield and to reduce manufacturing costs. A flexible substrate(100) is prepared. A groove(100a) of a micro pattern is formed on the flexible substrate. A thin film material of liquid phase is filled in the groove. A curing process is performed on the thin film material. The groove is formed on the flexible substrate by using a physical contact force. The groove is formed by using a rotation roll(10) or a press substrate. The rotation roll has a positive shape(10a) on the surface. The groove corresponding to the positive shape of the rotation roll is formed on the flexible substrate by driving the rotation roll.