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发明名称
Probe testing structure
摘要
A calibration structure for probing devices.
申请公布号
US7250626(B2)
申请公布日期
2007.07.31
申请号
US20040794246
申请日期
2004.03.05
申请人
CASCADE MICROTECH, INC.
发明人
LESHER TIMOTHY E.
分类号
H01L23/58;G01R;G01R1/067;G01R27/02;G01R27/04;G01R29/26;G01R31/02;G01R33/12;G01R35/00;H01L29/80;H01L31/112;H01P1/00;H01P1/16;H01P3/08
主分类号
H01L23/58
代理机构
代理人
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地址
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