| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint system without damage of a stamp and a substrate, with high fidelity. SOLUTION: There is provided a device for executing a two-step processing for transferring a pattern from a template (1) to a target surface of a substrate. This device is actuated by an imprint using a template in a first imprint unit 200, for example, by forming an intermediate disk from a thermoplastic polymer foil 10. A supply device 410 is actuated so as to supply the intermediate stamp to a second imprint unit 300, and the intermediate stamp is used by the second imprint unit for the imprint on the target surface of the substrate. COPYRIGHT: (C)2007,JPO&INPIT |
