发明名称 |
METHOD AND SYSTEM FOR SUPPLYING CARBON DIOXIDE |
摘要 |
Provided is a novel method and system for supplying high-pressure carbon dioxide to an application having a variable carbon dioxide flow requirement. The method includes providing a high-pressure carbon dioxide feed stream to a buffer volume (80) and determining the amount of carbon dioxide to be delivered to the application tool (100). The pressure in the buffer volume (80) is maintained at a pressure that exceeds the pressure required by the application tool (100). The temperature in the buffer volume (80) is further adjusted to modify the density of the carbon dioxide and based thereon the size of the buffer volume (80). Thereafter, the carbon dioxide from the buffer volume (80) is delivered at a variable flow rate as required by the application tool (100). ® KIPO & WIPO 2007
|
申请公布号 |
KR20070027689(A) |
申请公布日期 |
2007.03.09 |
申请号 |
KR20077000334 |
申请日期 |
2007.01.05 |
申请人 |
PRAXAIR TECHNOLOGY INC. |
发明人 |
JOHNSON MICHAEL CLINTON;TIMM MARTIN L.;BILLINGHAM JOHN FREDRIC |
分类号 |
B08B3/10;B08B5/02;B08B7/00;C23G1/00;F17C9/02;H01L21/02 |
主分类号 |
B08B3/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|