| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement instrument of high operability and further high detection precision and detection resolution. SOLUTION: The measurement instrument comprises: a phase signal transmission means 400 for transmitting the different phase signal to the different rotation angle of a spindle 300 corresponding to the rotation of the spindle 300; and an operation process part 500 for obtaining the absolute position of the spindle by operation processing the phase signal. The phase signal transmission means transmits the phase signal with a prescribed pitch. Because the phase signal is different from the rotation angle of a spindle 300, the rotation angle of the spindle 300 is unambiguously determined from the phase signal. Differently from the incremental system, since skip in reading of the phase signal is not a problem, the operability of the measurement instrument can be improved while the high-speed rotation of the spindle 300 is allowed. Because the skip in the reading of the phase signal is not the problem the variation of the phase signal to the rotation of the spindle 300 can be elaborated. COPYRIGHT: (C)2007,JPO&INPIT |
