Micro-channel plate used in a portable miniaturized electron microscope comprises micro-pores completely penetrated by a dielectric support layer which is held as a freely supported membrane in a semiconductor substrate

摘要

Micro-channel plate (MCP) comprises micro-pores (MPO) completely penetrated by a dielectric support layer (DTS) which is held as a freely supported membrane (FTM) in a substrate made from a semiconductor material. The micro-pores are formed by etched ion trace channels (ISK). An independent claim is also included for a method for the production of a micro-channel plate. Preferred Features: The membrane has through-holes and/or bars. The ion trace channels are conical and the larger diameter of the channels is arranged on the inlet side of the micro-channel plate.