SHAPE VARIABLE MIRROR AND OPTICAL PICKUP APPARATUS PROVIDED WITH SAME

摘要

PROBLEM TO BE SOLVED: To provide a shape variable mirror wherein joining strength between constituent members which constitute the shape variable mirror is increased and which has high reliability in device strength and is so constituted that the number of components is not increased in the shape variable mirror whose mirror surface is deformed.

SOLUTION: In the shape variable mirror 1 whose mirror surface is deformed, a thin layer of Au is vapor-deposited on each of joining surfaces on which a mirror part 3 and piezoelectric elements 4 are joined and each of surfaces on which the piezoelectric elements 4 and a supporting substrate 2 are joined and joining operation is performed by press-fixing at high temperature of 400 to 500°C. Thereby, joining strength between the mirror part 3 and the piezoelectric elements 4 and between the piezoelectric elements 4 and the supporting substrate 2 is increased.

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