| 摘要 |
PROBLEM TO BE SOLVED: To turn an optical scanner in a wide angle range at high speed, to make manufacturing easy, and to minimize the warpage of a reflection face of the optical scanner. SOLUTION: The optical scanner 20 includes: a reflection plate 30 formed of a semiconductor substrate, provided with a reflection part 31 for reflecting light on the central part of at least one face side, and freely turnably supported so as to vary the direction of the reflection part 31; and a coil 32 formed of a metallic material which is vapor-deposited so as to go around along the peripheral part of either one face of the reflection plate 30. The reflection plate 30 is turned by the force generated by energizing the coil 32. Slits 33 and 34 are provided respectively at the parts which surround the both end parts in the direction perpendicular to the center of the turning of the reflection part 31 in the annular region between the reflection part 31 of the reflection plate 30 and the peripheral part on which the coil 32 is formed. COPYRIGHT: (C)2007,JPO&INPIT
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