发明名称 |
SYSTEM AND METHOD OF CONTROLLING FLUID FLOW |
摘要 |
<p>Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.</p> |
申请公布号 |
KR20060127122(A) |
申请公布日期 |
2006.12.11 |
申请号 |
KR20067015651 |
申请日期 |
2005.02.07 |
申请人 |
ENTEGRIS, INC. |
发明人 |
LAVERDIERE MARC;MCLOUGHLIN ROBERT F |
分类号 |
G05D7/00;G05D7/06;G05D11/00 |
主分类号 |
G05D7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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