Photosensitive composition, compound for use in the photosensitive composition and pattern forming method using the photosensitive composition

摘要

A photosensitive composition comprising: (A) a compound capable of generating a compound having a specific structure upon irradiation with actinic rays or radiation, a pattern forming method using the photosensitive composition, and a compound capable of generating a compound having a specific structure upon irradiation with actinic rays or radiation.