Method for laser machining forms impaired layer inside of workpiece by focused laser beam oscillated by beam oscillator via objective condensor lens, or collector lens

摘要

Laser machining forms impaired layer inside workpiece by laser beam oscillation via objective condensor or collector lens, so that laser beam is guided into objective condensor lens in specified manner. Thus it is secured that shading or screening loss of objective condensor lens is 25-35 per cent by changing optical path by laser oscillator, providing adjustment.