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经营范围
发明名称
Lithographic projection apparatus
摘要
申请公布号
EP1014197(B1)
申请公布日期
2006.11.08
申请号
EP19990309872
申请日期
1999.12.08
申请人
ASML NETHERLANDS B.V.
发明人
VAN DER VEEN, PAUL;NOORDMAN, OSCAR FRANCISCUS JOZEPHUS
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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