| 摘要 |
PROBLEM TO BE SOLVED: To correct magnetic field distortions in an electron backscatter diffraction (EBSD) pattern. SOLUTION: A method is provided for correcting magnetic field distortions in the electron backscatter diffraction (EBSD) pattern. An EBSD pattern is firstly generated from a sample placed within an electron microscope. A predetermined representation of a magnetic field in the microscope is used to calculate the trajectories of electrons in the microscope, for different emergence angles. A corrected EBSD pattern is then calculated using the calculated trajectories, the corrected EBSD pattern representing the EBSD pattern if the microscope magnetic field were substantially absent. COPYRIGHT: (C)2007,JPO&INPIT
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