| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for growing a gallium nitride single crystal into which oxygen can be incorporated as an n-type dopant. SOLUTION: A gallium nitride crystal is doped with oxygen by using a seed crystal having a non-C-plane as a surface (top face) to grow a gallium nitride crystal in a vapor phase while keeping the non-C-plane surface by supplying a source material gas containing a gallium source material, a nitrogen source material and oxygen for doping and allowing oxygen to infiltrate through the surface. Otherwise, a gallium nitride crystal is doped with oxygen by using a seed crystal having a C-plane as the surface, producing a non-C-plane facet to grow a gallium nitride crystal in a vapor phase in the c-axis direction while keeping the facet by supplying a source material gas containing a gallium source material, a nitrogen source material and oxygen for doping, and allowing oxygen to infiltrate through the facet. COPYRIGHT: (C)2007,JPO&INPIT
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