| 摘要 |
PROBLEM TO BE SOLVED: To provide a variety of treatment device and the like for carrying out partial replacement work highly accurately and effectively while the device construction is made compact and simplified. SOLUTION: A slider 7 of an X-directional moving mechanism 5 is provided on a lower side of a suction table 3. The slide rail 9 of the X-directional moving mechanism 5 is provided on an upper side of a base 10. By moving the slider 7 along the slide rail 9, the position adjustment of the suction table 3 is carried out. By taking out and inserting the slider 7 to the slide rail 9, the remove and attachment of the suction table 3 can be performed. A permanent magnet 20 of a driving mechanism 19 is provided on the lower side of the suction table 3. The coil 21 of the driving mechanism 19 is provided on the upper side of a base 10. The driving force of the driving mechanism 19 acts on the X-directional movement mechanism 5, so the suction table 3 moves along the slide rail 9 on the upper side of the base 10. COPYRIGHT: (C)2007,JPO&INPIT
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