发明名称 SEMICONDUCTOR LIGHT RECEIVING DEVICE AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To suppress a drop in photosensitivity in a region where a photo diode in a semiconductor light receiving device is divided. <P>SOLUTION: The semiconductor light receiving device is used including a plurality of photo diodes 2-1 and 2-2 and a separation part 21. The plurality of photo diodes 2-1 and 2-2 are provided on a semiconductor substrate 10 and electrically converts received light. The separator 21 electrically separates the plurality of photo diodes 2-1 and 2-2 from each other. The separator 21 has a concentration of impurities on its surface of a first concentration or lower. The first concentration is a concentration with which photosensitivity of the separator 21 for a wavelength of blue-violet laser light or longer is approximately equal to photosensitivity in each of the plurality of photo diodes 2-1 and 2-2. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006286806(A) 申请公布日期 2006.10.19
申请号 JP20050102836 申请日期 2005.03.31
申请人 NEC ELECTRONICS CORP 发明人 NAGASHIMA NOBUYUKI
分类号 H01L27/146;H01L31/10 主分类号 H01L27/146
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