| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing apparatus which can deliver a workpiece to a top ring without causing a positional error, and can accurately perform a polishing operation. <P>SOLUTION: A delivery device 18 comprises a guide member 45 for centering the workpiece W by guiding the outer periphery of the workpiece W to be carried-in by means of its receiving portion, a mounting stand 53 which moves upward and downward relative to the guide member 45 and has a mounting portion 54 for receiving the centered workpiece W from the guide member 45 such that the upper surface of the workpiece W projects upward, and supporting mechanisms 56, 57, 60, 64 for supporting the mounting stand 53 so as to move downward, wherein the mounting stand 53 relatively approaches to the top ring 16 so as to bring the workpiece W received on the mounting portion 54 into pressure contact with the lower surface of the top ring 16, and delivers the workpiece W to the top ring 16. <P>COPYRIGHT: (C)2007,JPO&INPIT |
