| 摘要 |
PROBLEM TO BE SOLVED: To provide a prove for processing which has a processing needle of a prescribed shape at the top end, and can maintain a constant quality always. SOLUTION: This is a method of manufacturing a probe for processing 2 which has a cantilever 10 arranged opposed to a sample and a processing needle 11 which is provided at the top end of the cantilever 10 in a state opposed to the sample and capable of contacting the surface of the sample and of which top end is sharpened. The manufacturing method comprises a selection process in which a diamond piece which has a size to meet the tip dimension of the cantilever 10 and has a projection is selected from a plurality of diamond pieces, a transfer process to move the selected diamond piece on the processing table after the selection process, and a processing process in which, after the transfer process, the projection is etching-processed by focusing beams so as to be sharpened into a given shape and by installing the base end side of the projection to the top end of the cantilever 10 by utilizing the focusing beams, the processing needle 11 is manufactured. COPYRIGHT: (C)2006,JPO&NCIPI |
