SOI WAFER AND ITS MANUFACTURING METHOD,申请号EP20040787751-传众专利搜索

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发明名称	SOI WAFER AND ITS MANUFACTURING METHOD
摘要
申请公布号	EP1667218(A8)	申请公布日期	2006.08.09
申请号	EP20040787751	申请日期	2004.09.08
申请人	SUMCO CORPORATION	发明人	ENDO, AKIHIKO;MORIMOTO, NOBUYUKI
分类号	H01L21/322;H01L21/762;H01L27/12	主分类号	H01L21/322
代理机构		代理人
主权项
地址

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