Lithographic apparatus and device manufacturing method,申请号SG20050008043-传众专利搜索

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发明名称	Lithographic apparatus and device manufacturing method
摘要
申请公布号	SG123713(A1)	申请公布日期	2006.07.26
申请号	SG20050008043	申请日期	2005.12.13
申请人	ASML NETHERLANDS B.V.;ASML HOLDING N.V.	发明人	BLEEKER ARNO JAN;BASELMANS JOHANNES JACOBUS MATHEUS;DIERICHS MARCEL MATHIJS THEODORE MARIE;WAGNER CHRISTIAN;RYZHIKOB LEV;SMIRNOV, STANISLAV, Y.;TROSST KARS ZEGER
分类号		主分类号
代理机构		代理人
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