METHOD FOR REMOVING TITANIUM OR TANTALIUM POLYMER,申请号KR20040116983-传众专利搜索

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发明名称	METHOD FOR REMOVING TITANIUM OR TANTALIUM POLYMER
摘要
申请公布号	KR20060078671(A)	申请公布日期	2006.07.05
申请号	KR20040116983	申请日期	2004.12.30
申请人	MAGNACHIP SEMICONDUCTOR, LTD.	发明人	KIM, SUNG HYOK
分类号	H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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