| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor testing apparatus and a test system for improving the stability in test quality by self-compensating the noise superimposed on a voltage applied to a device under test. SOLUTION: A detection circuit 5 is provided for detecting the electrical load factors, affecting test results occurring at testing of a semiconductor device 4 from the electrical signal applied to input/output terminals of the semiconductor device 4. COPYRIGHT: (C)2006,JPO&NCIPI
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