| 摘要 |
PROBLEM TO BE SOLVED: To provide a point diffraction interference measuring device capable of performing absolute shape measurement of a spherical lens or a mirror stably with ultra-high accuracy by reducing an error caused by an influence of reflected light from the vicinity of a pinhole. SOLUTION: This device has a lens for condensing once light from a light source, a pinhole having a proper size for converting the condensed light into an ideal spherical wave, and a light wave shaping plate having a window having a size enough to pass light wave front information in the vicinity thereof together with the pinhole. The device is characterized by vibrating the light wave shaping plate. Interference fringe noise caused by the reflected light from the vicinity of the pinhole is averaged by vibrating the light wave shaping plate, and the error caused by the influence of the reflected light from the vicinity of the pinhole can be reduced. COPYRIGHT: (C)2006,JPO&NCIPI
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