| 摘要 |
PROBLEM TO BE SOLVED: To achieve increased density and high-speed by fusing manufacturing processes of a piezoelectric body and electric wiring, by facilitating joining between the piezoelectric body and a pressure chamber member, and by securing sealability for liquid of the electric wiring and the piezoelectric body. SOLUTION: A method for manufacturing a liquid discharging head includes: an electric wiring forming step of removing at least a part of a silicon substrate, and forming electric wiring for supplying a drive signal to drive the piezoelectric body at the part where the silicon substrate is removed; an piezoelectric body forming step of forming the piezoelectric body on the part where the silicon substrate is at least not removed in the electric wiring forming step; and a vibration plate forming step of forming the vibration plate on a side of the piezoelectric body opposite to the silicon substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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