发明名称 MANUFACTURING METHOD OF ELECTRONIC DEVICE, COMBINATION DETECTING PROGRAM FOR FUSE AND INSPECTION DEVICE FOR ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide the manufacturing method of an electronic device capable of simply detecting a combination suitable for joining with an objective value out of a plurality of combinations, a combination detecting program for fuse and an inspection device for the electronic device. SOLUTION: The detection of the combination, suitable for joining among 32 combinations upon cutting the fuses F1-F5 in accordance with a predetermined combination to join the frequency characteristics of an oscillation circuit 8 with an aimed value, is effected by a method wherein the resistance values of resistance elements R'1-R'5 in a TEG (Test Elementary Group) formed respectively, so as to be corresponding to a plurality of resistance elements R1-R5 constituting the oscillation circuit 8 are measured respectively to estimate the resistance values of the resistance elements R1-R5 respectively based on the result of measurement. Next, the frequency characteristics obtained respectively when the fuses F1-F5 are cut in accordance with 32 combinations are simulated based on the estimated resistance values of the resistance elements R1-R5. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006093384(A) 申请公布日期 2006.04.06
申请号 JP20040276602 申请日期 2004.09.24
申请人 SEIKO EPSON CORP 发明人 KOBAYASHI YOSHIYUKI
分类号 H01L21/82;G01R31/28;H01L21/00 主分类号 H01L21/82
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