| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid ejection head which can surely prevent a discharge failure such as nozzle clogging due to foreign matters. SOLUTION: The manufacturing method includes steps of: forming a piezoelectric element consisting of a lower electrode, a piezoelectric layer and an upper electrode, on one surface side of a flow passage-forming substrate through a diaphragm, and also forming a through-hole by removing a diaphragm in an area being a communicating part; forming a lead electrode and also forming a discontinuous metal layer at at least a part of an area corresponding to the through-hole; fixing a reserver-forming substrate on the one surface side of the flow passage-forming substrate through an adhesive layer; wet etching the flow passage-forming substrate from the other surface side in a state of the through-hole being sealed up by a film including at least the discontinuous metal layer; communicating a reserver section with a communicating section by completely removing by wet etching at least a metal layer constituting the discontinuous metal layer; and forming a liquid protective film consisting of a material having a liquid resistance at least on an inner surface of the reserver. COPYRIGHT: (C)2006,JPO&NCIPI
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