FLOW CONTROLLING FEEDBACK SYSTEM CAPABLE OF AUTOMATICALLY CONTROLLING OF FLOW OF FLUID AND FLOW CONTROLLING METHOD FOR FLUID AUTOMATICALLY

摘要

A fluid control feedback system and a fluid flow control method capable of controlling the flow of fluids used during a manufacturing of semiconductor device are disclosed. A sensing unit senses a dispensed state of a fluid. A monitoring section monitors the dispensed state of the fluid sensed by the sensing unit. A main controller compares a value of the dispensed state sensed by the sensing unit with a set value and correcting the dispensed state of the fluid according to the compared result to output a corrected value. A fluid dispensing controller controls a predetermined device to dispense the fluid based on the corrected value from the main controller.