ENERGY HARVESTING MOLECULES AND PHOTORESIST TECHNOLOGY
摘要
A composition including a first moiety; and a different second moiety capable of harvesting energy from an external source, wherein the second moiety is positioned such that energy harvested at the second moiety may be transferred to the first moiety. An article of manufacture including a film including a first moiety and a different second moiety capable of harvesting energy from an external source, wherein the second moiety is positioned such that collectively the first and second moieties have an electron capture cross-section greater than the electron capture cross-section of the first moiety alone. A method including forming a film on a substrate including a first moiety and a different second moiety; exposing the film to photonic or charged particle radiation; and patterning the film.
申请公布号
WO2006017014(A2)
申请公布日期
2006.02.16
申请号
WO2005US22980
申请日期
2005.06.27
申请人
INTEL CORPORATION;MEAGLEY, ROBERT, P.;GOODNER, MICHAEL, D.;LEET, ROBERT, E.;MCSWINEY, MICHAEL, L.
发明人
MEAGLEY, ROBERT, P.;GOODNER, MICHAEL, D.;LEET, ROBERT, E.;MCSWINEY, MICHAEL, L.