| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide the manufacturing method of a photoelectric conversion device capable of realizing high integration by improving a laser scribe process when manufacturing the photoelectric conversion device; and by meeting three conditions where grooves are not overlapped each other, the interval between the grooves is short, and work is made quickly. <P>SOLUTION: A device for performing a first laser scribe process has four sets of laser optical systems 10, 11, 12, 13. In the first laser scribe process, laser beams are emitted from each laser optical system, and a first mark 21 corresponding to each laser optical system is provided in a transparent conductive film 2 on a substrate 1. In a second laser scribe process, the positions of marks 21, 22 provided in the first laser scribe process are confirmed prior to the formation of a second groove 6, the distance among respective laser optical systems 30, 31, 32, 33 is corrected, and an adjustment is made so that the interval of the laser beams emitted to the substrate 1 becomes equal to that between prior first grooves 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
