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发明名称
THERMAL OXIDE FORMATION APPARATUS AND THE METHOD BY CHEMICAL VAPOR DEPOSITION IN WAFER
摘要
申请公布号
KR20060012703(A)
申请公布日期
2006.02.09
申请号
KR20040061307
申请日期
2004.08.04
申请人
EUGENE TECHNOLOGY CO., LTD.
发明人
UM, PYUNG YONG
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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